1. What is the difference between LPCVD and PECVD? (Note: Saying“The letter E.†is not a sufficient answer.)
1. Explain why chemical mechanical polished (CMP) is essentialfor making integrated circuits that have hundreds of millions oftransistors.
3. Why must an ion implant be followed by a high-temperatureannealing step? And what is the down-side of having to do thisfollow-up anneal??
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