Basic Semiconductor Process Lab Fabrication
9. How do you adjust the spin speed and spin time...
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Electrical Engineering
Basic Semiconductor Process Lab Fabrication
9. How do you adjust the spin speed and spin time if you foundthat the PR solution is thick(not flowing freely)?
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Thinckness t Speed w t is inversely proportional to square root of w tc 1sqrtw c proportionality constant Spin speed The range of spin speeds available is important as it defines the range of thicknesses that can be achieved from a given solution In general spin coating can produce uniform films relatively easily from about 1000 rpm
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