Provide a description of the materials selection for the
following micro-sensors/actuators:
1.) substrates and wafers
2.) silicon compounds...
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Mechanical Engineering
Provide a description of the materials selection for thefollowing micro-sensors/actuators:
1.) substrates and wafers
2.) silicon compounds such as dioxide, carbide, nitride, andpolycrystalline
3.) silicon piezoelectric
4.) gallium arsenide
5.) piezoelectric crystals
6.) polymers
7.) films
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3.6 Ratings (408 Votes)
Ans1 Silicon is most commonly material used as a substrate Properties of silicon as a substrate are as follows Mechanically stable High melting point 1400 C Ideal structural material with young modulus close to steel and light weight as a compared to Aluminium Wafers material can be silicon or single crystalline material like quartz and gallium arsenide Ans2 Silicon oxide in microsystems 1 Acts as a
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