Why is edge bead more common in thick SU-8 compared to thin
Shipley 1827? How can...
60.1K
Verified Solution
Link Copied!
Question
Mechanical Engineering
Why is edge bead more common in thick SU-8 compared to thinShipley 1827? How can we minimize the edge bead problem (describeall possible methods)? What kind of issues does edge bead producein soft bake and exposure?
Answer & Explanation
Solved by verified expert
4.3 Ratings (630 Votes)
Edge bead removal methods The first method was to spin the wafer very slowly to spread the SU8 out However using this method created several uncovered areas around the edge The second method attempted to remove the bead with acetone
See Answer
Get Answers to Unlimited Questions
Join us to gain access to millions of questions and expert answers. Enjoy exclusive benefits tailored just for you!
Membership Benefits:
Unlimited Question Access with detailed Answers
Zin AI - 3 Million Words
10 Dall-E 3 Images
20 Plot Generations
Conversation with Dialogue Memory
No Ads, Ever!
Access to Our Best AI Platform: Flex AI - Your personal assistant for all your inquiries!
